Title :
The investigation of effect of thin films conductivity on the acoustic waves in structures containing piezoelectric plates
Author :
Kuznetsova, I.E. ; Zaitsev, B.D. ; Anisimkin, V.I. ; Kolesov, V.V. ; Fionov, A.S. ; Melikhov, M.Z. ; Kashin, V.V. ; Teplykh, A.A.
Author_Institution :
Kotel´nikov Inst. of Radio Eng. & Electron., Moscow, Russia
Abstract :
The fractional change in velocity and attenuation of the zero-order acoustic wave with shear-horizontal polarization propagating in “YX LiNbO3 - air gap - conducting film deposited of glass surface” are experimentally investigated. The possibility of determination of film conductivity in such structure by the noncontact methods is demonstrated.
Keywords :
acoustic waves; electrical conductivity; glass; lithium compounds; piezoelectric materials; thin films; LiNbO3; acoustic waves; glass surface; noncontact method; piezoelectric plates; shear horizontal polarization; thin films conductivity; zero order acoustic wave;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959621
