A system to translate product yield targets to equipment particle targets

Random defectivity reduction is an important prerequisite to achieving mature production yields. The typical technology roadmap includes a product yield / defect density reduction curve over the technology lifetime. Translating the defect density reduction curve into specific monthly targets for each individual module or for each single tool, has proven to be an extremely challenging task. This paper summarizes a proposed method to translate overall technology or product yield targets into corresponding defect density targets allocated to each tool. Achieving this task requires extensive characterization and modeling. This method was eventually used at a fab running 130 nm 6 metal layer copper process.