Title :
Microwave micromodifier power mode optimization for microtechnologies
Author :
Gordienko, Yu.O. ; Larkin, S.Yu. ; Slipchenko, M.I. ; Csherbak, Ye.L.
Author_Institution :
Kharkov Nat. Univ. of Radioelectron., Kharkov, Ukraine
Abstract :
The present paper concerns theoretically investigated features of spatiotemporal establishment of the temperature at the local high microwave heating of semiconductor object using a near-field micromodifier. We propose a method that partially allows withdrawing a problem of the required temperature and locality retention through by means of the combined pulsed microwave power supply of the micromodifier.
Keywords :
microwave devices; microwave heating; optimisation; power semiconductor devices; power supply circuits; combined pulsed microwave power supply; microtechnology; microwave heating; microwave micromodifier power mode optimization; near-field micromodifier; semiconductor object; spatiotemporal establishment; Optimization;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959625
