DocumentCode
1564522
Title
Use of Spatial Pattern Recognition (SPR) for Enhancing the Resolution and Identification of Rogue Tools in Manufacturing
Author
Retersdorf, Mike ; Anand, Anulekha ; Drozda-Freeman, Andrew ; McIntyre, Mike ; Song, Xin ; Wang, Jenny
Author_Institution
AMD, Austin, TX
fYear
2008
Firstpage
200
Lastpage
205
Abstract
In today´s advanced manufacturing environments, rapid problem recognition is critical to the financial success of the factory. Automated data mining and analysis routines initially flag more and more factory problems. Unless properly tuned, however, these automated systems can generate a mountain of process control signals and create additional work for engineers who must determine which are worthy of further analysis and follow-up. Incorporating spatial patterns into these automated analysis routines can bring to engineers´ attention real signals that would otherwise be lost in the noise. This enhanced signal clarity enables the engineers to better articulate problems and more quickly drive solutions. This paper will explore how to enhance signals by incorporating spatial patterns into the data mining process and offer practical examples showing how to use these results to better focus fab resources in problem-solving activities.
Keywords
data mining; factory automation; pattern recognition; process control; automated data mining; process control; rogue tools; semiconductor manufacturing; spatial pattern recognition; Data analysis; Data mining; Manufacturing; Pattern recognition; Process control; Production facilities; Signal analysis; Signal generators; Signal processing; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
Conference_Location
Cambridge, MA
ISSN
1078-8743
Print_ISBN
978-1-4244-1964-7
Electronic_ISBN
1078-8743
Type
conf
DOI
10.1109/ASMC.2008.4529030
Filename
4529030
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