• DocumentCode
    1564522
  • Title

    Use of Spatial Pattern Recognition (SPR) for Enhancing the Resolution and Identification of Rogue Tools in Manufacturing

  • Author

    Retersdorf, Mike ; Anand, Anulekha ; Drozda-Freeman, Andrew ; McIntyre, Mike ; Song, Xin ; Wang, Jenny

  • Author_Institution
    AMD, Austin, TX
  • fYear
    2008
  • Firstpage
    200
  • Lastpage
    205
  • Abstract
    In today´s advanced manufacturing environments, rapid problem recognition is critical to the financial success of the factory. Automated data mining and analysis routines initially flag more and more factory problems. Unless properly tuned, however, these automated systems can generate a mountain of process control signals and create additional work for engineers who must determine which are worthy of further analysis and follow-up. Incorporating spatial patterns into these automated analysis routines can bring to engineers´ attention real signals that would otherwise be lost in the noise. This enhanced signal clarity enables the engineers to better articulate problems and more quickly drive solutions. This paper will explore how to enhance signals by incorporating spatial patterns into the data mining process and offer practical examples showing how to use these results to better focus fab resources in problem-solving activities.
  • Keywords
    data mining; factory automation; pattern recognition; process control; automated data mining; process control; rogue tools; semiconductor manufacturing; spatial pattern recognition; Data analysis; Data mining; Manufacturing; Pattern recognition; Process control; Production facilities; Signal analysis; Signal generators; Signal processing; Spatial resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
  • Conference_Location
    Cambridge, MA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4244-1964-7
  • Electronic_ISBN
    1078-8743
  • Type

    conf

  • DOI
    10.1109/ASMC.2008.4529030
  • Filename
    4529030