Title :
Early Detection of a Manufacturing Problem using Product Test Data
Author :
Beutl, Michael ; Prossegger, Alexander ; Wawrina, Axel ; Rathei, Dieter
Author_Institution :
Schloss Premstatten, Austriamicrosystems AG, Unterpremstatten
Abstract :
The use of product test data for manufacturing control has been repeatedly suggested in various papers and talks [1,2], and a working implementation has been presented by some of us using the YieldWatchDogTM software [3]. This paper presents a case study demonstrating how this software can be used to detect imminent production problems.
Keywords :
integrated circuit manufacture; integrated circuit testing; YieldWatchDog software; imminent production problems; manufacturing problem; product test data; Computer aided software engineering; Condition monitoring; Parametric statistics; Probes; Production; Pulp manufacturing; Signal design; Signal processing; Software testing; Statistical analysis;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
978-1-4244-1964-7
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2008.4529035
