Title :
New Elastomer Materials Provide Enhanced Longevity and Sealing Performance for Semiconductor Manufacturing Equipment
Author :
Foggiato, John ; Alexander, Brock
Author_Institution :
Greene Tweed Co, Santa Clara, CA
Abstract :
A review of materials and optimization of seal designs is given emphasizing performance enhancement of manufacturing equipment. Various attributes are delineated as they pertain to aggressive temperature and chemical environments.
Keywords :
elastomers; production equipment; seals (stoppers); semiconductor device manufacture; elastomer materials; longevity-sealing performance; seal designs; semiconductor manufacturing equipment; temperature-chemical environments; Bonding; Chemicals; Hydrogen; Plasma chemistry; Plasma temperature; Sealing materials; Seals; Semiconductor device manufacture; Semiconductor materials; Spine;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
978-1-4244-1964-7
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2008.4529044
