Title :
Capacitor structures on the basis of strontium titanate films
Author :
Sohrabi, Anaraki H. ; Gaponenko, N.V. ; Rudenko, M.V. ; Zavadskij, S.M. ; Golosov, D.A. ; Kolos, V.V. ; Petlitskij, N.A. ; Turtsevich, A.S.
Author_Institution :
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
Abstract :
Thin layers of strontium titanate have been synthesized with sol-gel method. The strontium titanate phase is registered with X-ray diffraction analysis. The thickness of the strontium titanate xerogel films deposited by a spin-on technique is in the range of 200-280 nm for 5 and 6 layers. The properties of capacitors´ structures on the basis of SrTiO3 xerogels in relation to morphology are discussed. The values of the dielectric constant and the lose factor are found to be 186 and 0.08, respectively, for the frequency of 1 MHz.
Keywords :
X-ray diffraction; aerogels; dielectric losses; sol-gel processing; strontium compounds; thin film capacitors; SrTiO3; X-ray diffraction analysis; capacitor structure; dielectric constant; frequency 1 MHz; lose factor; size 200 nm to 280 nm; sol-gel method; spin-on technique; strontium titanate xerogel film; Europe; Silicon; Titanium compounds;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959647
