DocumentCode

1564882

Title

"There\´s Antimony, Arsenic, Aluminium, Selenium...Materials in Semiconductor Manufacturing"

Author

Case, Christopher

Author_Institution

Chief Technology Officer, Linde Electronics

fYear

2008

Firstpage

354

Lastpage

354

Keywords

Aluminum; Semiconductor device manufacture; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI

Conference_Location

Cambridge, MA, USA

ISSN

1078-8743

Print_ISBN

978-1-4244-1964-7

Electronic_ISBN

1078-8743

Type

conf

DOI

10.1109/ASMC.2008.4529068

Filename

4529068