Title :
"There\´s Antimony, Arsenic, Aluminium, Selenium...Materials in Semiconductor Manufacturing"
Author :
Case, Christopher
Author_Institution :
Chief Technology Officer, Linde Electronics
Keywords :
Aluminum; Semiconductor device manufacture; Solid state circuits;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
Conference_Location :
Cambridge, MA, USA
Print_ISBN :
978-1-4244-1964-7
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2008.4529068
