Title :
Lifetime of magnetic tunnel junctions under voltage stress
Author :
Gibbons, M. ; Kyusik Sin ; Funada, S. ; Xizeng Shi
Author_Institution :
Read-Rite Corp., Fremont, CA, USA
Abstract :
Summary form only given. Magnetic tunnel junctions (MTJ) are being investigated for possible application in magnetic sensors and memories. Due to the thin tunnel barrier, the junctions are very sensitive to electrical breakdown and degradation. This paper describes the lifetime of junctions under voltage stress with extrapolation to use conditions assuming an exponential acceleration factor. The tunneling films were deposited with a DC magnetron sputtering system. The aluminum layer is plasma oxidized in an oxidation module to form an Al/sub 2/O/sub 3/ tunneling barrier. Aluminum thickness, oxidation times, and plasma powers were used to create barriers of different thickness. The film structure is NiFe/PtMn/CoFe/Ru/CoFe/AlO/CoFe/NiFe/Ta. The TMR response of the junction decreases with voltage resulting in a peak for the TMR signal versus voltage. The acceleration factor calculated in stress testing can be used to estimate the junction lifetime at the optimum operating voltage.
Keywords :
electric breakdown; electric fields; extrapolation; life testing; oxidation; plasma materials processing; sputter deposition; tunnelling magnetoresistance; Al/sub 2/O/sub 3/; Al/sub 2/O/sub 3/ tunneling barrier; MTJ; NiFe-PtMn-CoFe-Ru-CoFe-AlO-CoFe-NiFe-Ta; NiFe/PtMn/CoFe/Ru/CoFe/AlO/CoFe/NiFe/Ta film structure; TMR response; TMR signal peak; acceleration factor; aluminum layer plasma oxidation; aluminum thickness; barrier thickness; electrical breakdown sensitivity; electrical degradation sensitivity; exponential acceleration factor; extrapolation; magnetic memories; magnetic sensors; magnetic tunnel junction lifetime; magnetron sputtering system; optimum operating voltage; oxidation times; plasma powers; stress testing; thin tunnel barrier; tunneling films; voltage stress; Aluminum; Degradation; Electric breakdown; Life estimation; Magnetic sensors; Magnetic tunneling; Oxidation; Plasma accelerators; Stress; Voltage;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1000763