Simulation model of the development of irreversible processes in film conductive structures under the influence of powerful microwave radiation

This paper presents a simulation model for the development of irreversible processes in inhomogeneous conductive films with a thickness of more than 60 microns under exposure of microwave radiation. The model considers the direct absorption of microwave power by a conductive film. Distribution of the electromagnetic field on the surface of the film and dynamics of development of thermal processes with account for the dependence of the conductivity on temperature is obtained.