DocumentCode
156550
Title
Microwave resonator measuring converter in the diagnosis of semiconductor plates
Author
Polietaiev, D.A. ; Starostenko, V.V. ; Shadrin, A.A.
Author_Institution
Tavrida Nat. Univ., Simferopol, Russia
fYear
2014
fDate
7-13 Sept. 2014
Firstpage
914
Lastpage
915
Abstract
Electrodynamic characteristics of the resonator measuring converter that used for the diagnosis of semiconductor structures are theoretically identified. The analysis of basic geometric parameters, that determines the characteristics of the probe and its sensitivity, is conducted.
Keywords
convertors; electrodynamics; microwave resonators; plates (structures); probes; semiconductor devices; geometric parameter analysis; microwave resonator measuring converter electrodynamic characteristics; probe characteristics; probe sensitivity; semiconductor plate structure diagnosis; Logic gates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-966-335-412-5
Type
conf
DOI
10.1109/CRMICO.2014.6959691
Filename
6959691
Link To Document