Title :
(Paper CH011) effect of strain, microstructure, and interfaces on tunability and relaxor-like dielectric behavior in barium strontium titanate thin-films
Author :
Zednik, Ricardo J. ; McIntyre, Paul C. ; Baniecki, John D. ; Ishii, Masatoshi ; Kurihara, Kazuaki
Author_Institution :
Department of Materials Science and Engineering, Stanford University, CALIFORNIA, USA
Abstract :
We present the results of a systematic study of sputter deposited barium strontium titanate (BST) thin-film planar capacitors to better understand the effects of strain, microstructure, and interfaces on their tunability and relaxor-like dielectric behavior. Asymmetric x-ray diffraction measurements were employed to determine the structure and strain state of epitaxial and polycrystalline BST thin-films thinner than 100 nm. Electrical measurements at temperatures ranging from room temperature down to liquid helium assist in the isolation of competing mechanisms for time-dependent and field-dependent dielectric response.
Keywords :
Barium; Binary search trees; Capacitive sensors; Dielectric measurements; Dielectric thin films; Microstructure; Strain measurement; Strontium; Temperature measurement; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4688118
