Title :
An integrated optoelectronic CO/sub 2/ gas sensor
Author :
Morgan, C.H. ; Cheung, P.W.
Author_Institution :
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
Abstract :
A novel CO/sub 2/ sensor has been demonstrated that employs micromachined structures to produce a device that can be mass-produced with a high degree of integration of optoelectronic and chemical components. The sensor is designed to operate in a self-referencing mode that greatly minimizes short and long term drift of sensor response. Preliminary devices have been tested and exhibit a near-linear processed output over the range from 0 to 140 torr ambient CO/sub 2/.<>
Keywords :
biosensors; carbon compounds; chemical variables measurement; gas sensors; integrated optoelectronics; 0 to 140 torr; biosensor; integrated optoelectronic CO/sub 2/ gas sensor; long term drift; micromachined structures; neonates; physiological monitoring; self-referencing mode; sensor response; short term drift; Gas detectors; Integrated optoelectronics; Light emitting diodes; Metallization; Optical buffering; Optical films; Optical sensors; Particle beam optics; Photodiodes; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148880
