Auto-focusing system for microscope based on computational verb controllers

In this paper, an auto-focusing system of microscope for integrated circuits (IC) analysis is presented. In this system, the Laplacian algorithm is used as the evaluation function, which provides a reference to the degree of defocus. The auto-focusing controlling algorithm based on computational verb theory consists of two controllers designed: the moving-speed controller and the moving-direction controller. Both controllers work well under the verb-control rules designed in this paper. It has shown that the system can focus accurately and quickly, and it can adjust itself when it is out of focus.