Micromachined magnetostatic wave band-pass resonators

Author

Marcelli, Romolo ; Sajin, G. ; Cismaru, A.

Author_Institution

Microwave Microsystems Technol. Group, CNR-IMM, Rome, Italy

fYear

2002

Abstract

Summary form only given. Planar magnetostatic wave (MSW) technology is well known for providing frequency tunable configurations for linear and nonlinear microwave signal processing. MSW straight edge resonators (SER) are used as frequency selective elements for oscillators. Band-pass SERs are placed between two narrow microstrip transducers with side-coupling for both the input and the output microstrip. In this paper, two configurations have been studied: (i) a bulk one with the two microstrips realized on a silicon substrate, and (ii) a micromachined one with transducers having the same geometry but suspended on a membrane obtained by silicon substrate etching. Two YIG films were used, with: sample #1: 4/spl times/0.5/spl times/0.32 mm/sup 3/ and sample #2: 4/spl times/0.4/spl times/0.32 mm/sup 3/.

Keywords

band-pass filters; garnets; magnetic thin film devices; magnetic thin films; magnetostatic wave devices; micromachining; micromechanical resonators; yttrium compounds; 0.32 mm; 0.5 mm; 4 mm; Si; YFe5O12; YIG; YIG films; band pass straight edge resonators; frequency selective elements; frequency tunable configurations; micromachined magnetostatic wave band-pass resonators; microwave signal processing; side-coupling; Biomembranes; Frequency; Geometry; Magnetostatic waves; Microstrip; Microwave oscillators; Microwave technology; Signal processing; Silicon; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Conference_Location

Amsterdam, The Netherlands

Print_ISBN

0-7803-7365-0

Type

conf

DOI

10.1109/INTMAG.2002.1000935

Filename

1000935