Title :
Micromachined magnetostatic wave band-pass resonators
Author :
Marcelli, Romolo ; Sajin, G. ; Cismaru, A.
Author_Institution :
Microwave Microsystems Technol. Group, CNR-IMM, Rome, Italy
Abstract :
Summary form only given. Planar magnetostatic wave (MSW) technology is well known for providing frequency tunable configurations for linear and nonlinear microwave signal processing. MSW straight edge resonators (SER) are used as frequency selective elements for oscillators. Band-pass SERs are placed between two narrow microstrip transducers with side-coupling for both the input and the output microstrip. In this paper, two configurations have been studied: (i) a bulk one with the two microstrips realized on a silicon substrate, and (ii) a micromachined one with transducers having the same geometry but suspended on a membrane obtained by silicon substrate etching. Two YIG films were used, with: sample #1: 4/spl times/0.5/spl times/0.32 mm/sup 3/ and sample #2: 4/spl times/0.4/spl times/0.32 mm/sup 3/.
Keywords :
band-pass filters; garnets; magnetic thin film devices; magnetic thin films; magnetostatic wave devices; micromachining; micromechanical resonators; yttrium compounds; 0.32 mm; 0.5 mm; 4 mm; Si; YFe5O12; YIG; YIG films; band pass straight edge resonators; frequency selective elements; frequency tunable configurations; micromachined magnetostatic wave band-pass resonators; microwave signal processing; side-coupling; Biomembranes; Frequency; Geometry; Magnetostatic waves; Microstrip; Microwave oscillators; Microwave technology; Signal processing; Silicon; Transducers;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1000935
