DocumentCode
1567443
Title
High resolution analog interface for micromachined capacitive accelerometer
Author
Aaltonen, Lasse ; Rahikkala, Pasi ; Saukoski, Mikko ; Halonen, Kari
Author_Institution
Electron. Circuit Design Lab., Helsinki Univ. of Technol., Helsinki
fYear
2007
Firstpage
96
Lastpage
99
Abstract
A continuous time analog accelerometer interface is feasible when high dynamic range together with wide signal band is required. This paper provides design data for a 120 dB accelerometer with signal band of 300 Hz. Circuit structures for an integrated interface will be presented and important sources of instabilities discussed. Measured and simulated results will be provided to support the theory.
Keywords
accelerometers; micromechanical devices; micromachined capacitive accelerometer; time analog accelerometer interface; wide signal band; Accelerometers; Capacitive sensors; Circuit simulation; Feedback; Frequency; Linearity; Low pass filters; Operational amplifiers; Signal design; Signal resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuit Theory and Design, 2007. ECCTD 2007. 18th European Conference on
Conference_Location
Seville
Print_ISBN
978-1-4244-1341-6
Electronic_ISBN
978-1-4244-1342-3
Type
conf
DOI
10.1109/ECCTD.2007.4529545
Filename
4529545
Link To Document