Title :
Measuring system for micro force based on electrostatic theory
Author :
Qi, Yongyue ; Wang, Haitao ; Lin, Yuchi ; Zhao, Meirong
Author_Institution :
State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ., Tianjin, China
Abstract :
The micro force measuring technology is widely used in the area of micro friction test, liquid surface tension analysis, organism micro-structure force test, measurement and calibration of MEMS and NEMS, etc. In view of measurement and realization approach of micro force value, a micro measuring system is proposed. A control electrostatic force generator is adopted to reproduce micro force. The basic working principle is an exact designed cylindrical capacitor with the characteristics of long measurement range, fine linearity and faint border effect. A linear axletree with high precision and linearity is used to ensure concentricity of movement. In order to eliminate the interference from parasitical capacitance a hermetical shield is designed. By means of measuring the voltage between electrodes and capacitance change gradient, the micro force test at muN~nN degree could be realized.
Keywords :
calibration; force measurement; force sensors; microsensors; concentricity; control electrostatic force generator; cylindrical capacitor; electrodes; electrostatic theory; hermetical shield; liquid surface tension analysis; microforce measuring system; microfriction test; organism microstructure force test; parasitical capacitance; Area measurement; Electrostatic measurements; Force control; Force measurement; Friction; Linearity; Organisms; Parasitic capacitance; Surface tension; Testing; capacitance change gradient; capacitive sensor; electrostatic force; micro force value;
Conference_Titel :
Electronic Measurement & Instruments, 2009. ICEMI '09. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-3863-1
Electronic_ISBN :
978-1-4244-3864-8
DOI :
10.1109/ICEMI.2009.5274813
