Title :
Miniature integrated spectrometer fabricated on a silicon-on-insulator substrate
Author :
Brouckaert, Joost ; Roelkens, Gunther ; Selvaraja, Shankar ; Bogaerts, Wim ; Dumon, Pieter ; Verstuyft, Steven ; Yu, Zon-Qiang ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent
Abstract :
We demonstrate a compact and cost-effective 30-channel integrated spectrometer fabricated on a nanophotonic silicon-on-insulator (SOI) platform. The spectrometer consists of a planar concave grating (PCG) demultiplexer with heterogeneously integrated III-V photodetectors. The device has a resolution of 3.2 nm and a small footprint of ~2 mm2. The photodetectors have a dark current of ~3 nA at 5 V bias and a responsivity of 1 A/W. The on-chip loss for the central PCG channels is 3 dB, resulting in an on-chip responsivity of 0.5 A/W.
Keywords :
III-V semiconductors; dark conductivity; demultiplexing equipment; diffraction gratings; integrated optics; nanophotonics; photodetectors; silicon-on-insulator; spectrometers; III-V photodetectors; Si-SiO2; current 3 nA; demultiplexer; integrated spectrometer; miniature spectrometer; nanophotonic platform; on-chip loss; on-chip responsivity; photodetectors; planar concave grating; silicon-on-insulator substrate; thirty-channel spectrometer; Arrayed waveguide gratings; Detectors; Etching; Fabrication; Optical waveguides; Photodetectors; Silicon on insulator technology; Spectroscopy; Substrates; Wire;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688485
