Thin-film RF noise suppressor integrated onto a transmission line

Summary form only given. We discuss the possibility of the integrated countermeasure of radio-frequency (RF) electromagnetic (EM) noise emission on a RF integrated transmission line by using the loss generation of ferromagnetic thin-films. The targeting frequency range is 1-10 GHz, where most of the bulk and the composite ferrite materials have only a small loss generation. A 3/spl mu/m thick rf-sputter deposited Cu film was used form a thin coplanar transmission line on a soda glass substrate with a characteristic impedance of 50/spl Omega/. The co-planar line is most common in RF integrated circuits. An integrated magnetic thin-film countermeasure element was put on the transmission line with a 7/spl mu/m thick polyimide layer in between. The magnetic film suppresses the high frequency noise by means of ferromagnetic resonance (FMR) losses. The 0.1/spl mu/m thick Co/sub 85/Nb/sub 12/Zr/sub 7/ amorphous film was applied in narrow slit trains along the easy axis of magnetization in order to shift the FMR frequency toward the higher frequency range. The transmission characteristics were evaluated by the S/sub 21/ parameter.