Title :
Development of high-resolution MFM-tips
Author :
Koblischka, M.R. ; Muller, A.N. ; Hartmann, U. ; Sulzbach, T. ; Dodd, P.
Author_Institution :
Inst. of Exp. Phys., Saarlandes Univ., Saarbrucken, Germany
Abstract :
Summary form only given. In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.
Keywords :
electron beam lithography; magnetic force microscopy; scanning electron microscopy; soft magnetic materials; EBD-method; SEM; electron beam lithography; high-resolution MFM-tips; low magnetic moment; maximum lateral resolution; scanning electron microscope; small particles; soft magnetic samples; Demagnetization; Magnetic field measurement; Magnetic force microscopy; Magnetic noise; Perpendicular magnetic recording; Scanning electron microscopy; Signal resolution; Signal to noise ratio; Soft magnetic materials; Thermal stability;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001100
