Title :
Electro-optic polymer waveguide ring resonators defined with three electron beam irradiation effects
Author :
Sun, Haishan ; Chen, Antao ; Olbricht, Benjamin C. ; Davies, Joshua A. ; Sullivan, Philip A. ; Liao, Yi ; Shi, Zhengwei ; Luo, Jingdong ; Jen, Alex K.-Y. ; Dalton, Larry R.
Author_Institution :
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA
Abstract :
With increasing doses, irradiation of electron beam on chromophore doped polymers has the effects of depoling, bleaching and decomposition, which were exploited to directly fabricate high quality electro-optic polymer ring resonators with submicron features.
Keywords :
electro-optical devices; electron beam effects; optical fabrication; optical polymers; optical resonators; optical waveguides; bleaching; chromophore doped polymers; decomposition; depoling; electro-optic polymer waveguide ring resonators; electron beam irradiation effects; Bleaching; Chemistry; Electron beams; Electrooptical waveguides; Optical polymers; Optical resonators; Optical ring resonators; Optical waveguides; Refractive index; Tellurium;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688617
