Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

This paper presents the fabrication and characterization of a novel fully integrated micro electromagnetic vibration energy harvester using micro-patterning of bonded magnets. The magnetic material utilized is a polymer composite, consisting of a commercially available NdFeB powder dispersed in epoxy resin to a weight loading percentage of 90%. The prototype is fabricated using UV-LIGA technology and microelectroplating technology. The whole volume of the structure is about 20 mm³. Testing results show that the fabricated vibration energy harvesters can generate a maximum peak-peak voltage of 20.9 μV at the device´s resonance frequency of 365 Hz and input acceleration of 1 g (9.8 m/s²).