Title :
Nanoscale porous silicon waveguides for biosensing applications
Author :
Rong, G. ; Wei, X. ; Kang, C. ; Liscidini, M. ; Sipe, J.E. ; Mernaugh, R.L. ; Weiss, S.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Vanderbilt Univ., Nashville, TN
Abstract :
Nanoscale porous silicon waveguides, both on silicon substrates and free-standing membranes, are explored for biosensing applications. Measured detection limits in the nanomolar range are reported for DNA sensing.
Keywords :
DNA; biosensors; diffraction gratings; elemental semiconductors; integrated optics; membranes; molecular biophysics; optical fabrication; optical sensors; optical waveguides; porous semiconductors; silicon; substrates; DNA sensing; Si; biosensing applications; free-standing membranes; nanoscale porous silicon waveguides; prism-coupling; silicon substrates; subwavelength grating-coupling; Biological materials; Biomembranes; Biosensors; DNA; Gratings; Optical materials; Optical surface waves; Optical waveguides; Resonance; Silicon;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688629
