Title :
Silicon nanowire FET arrays for real time detection of chemical activation of cells
Author :
Moh, T.S.Y. ; Srivastava, S.K. ; Milosavljevic, S. ; Roelse, M. ; Pandraud, G. ; Zandbergen, H.W. ; de Smet, L.C.P.M. ; van Rijn, C.J.M. ; Sudhölter, E. J R ; Jongsma, M.A. ; Sarro, P.M.
Author_Institution :
Delft Inst. of Microsyst. & Nanoelectron., Delft Univ. of Technol., Delft, Netherlands
Abstract :
Silicon nanowire FET arrays have been designed and fabricated with a relatively low-cost, but wafer-scale process without the use of e-beam lithography. An optimized fabrication process that improves the etching uniformity of NWs and also provides a better control of the NW dimensions is presented. The fabricated devices are electrically characterized and their performance is discussed. A dedicated measurement set-up and a preparation procedure to employ these SiNW FET arrays for real time monitoring of the substance P activation of neurokinin (NK1) receptors in HEK 293 cells are presented.
Keywords :
biochemistry; biological techniques; biosensors; cellular biophysics; elemental semiconductors; etching; field effect transistors; molecular biophysics; nanobiotechnology; nanoelectronics; nanofabrication; nanosensors; nanowires; proteins; silicon; HEK 293 cells; Si; chemical activation; etching uniformity; neurokinin receptors; optimized fabrication process; real time detection; real time monitoring; silicon nanowire FET arrays; substance P activation; wafer-scale process; Current measurement; Etching; FETs; Nanobioscience; Silicon; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170424
