• DocumentCode
    1570764
  • Title

    Simple solutions for modelling the non-uniform substrate doping

  • Author

    Lallement, Christophe ; Enz, Christian ; Bucher, Matthias

  • Author_Institution
    Swiss Federal Inst. of Technol., Lausanne, Switzerland
  • Volume
    4
  • fYear
    1996
  • Firstpage
    436
  • Abstract
    Present-day CMOS processes use ion implantation to adjust the threshold voltages and to avoid the punch through effect. The substrate doping in the transistor can thus no longer be considered as uniform, and accurate modelling of this effect is required for precise analog circuit simulation. Two new solutions taking this effect into account are proposed and compared with other existing approaches. The results of these new models are compared with 2-D device simulations and measurements of a 2 μm CMOS low voltage process
  • Keywords
    CMOS integrated circuits; circuit analysis computing; doping profiles; ion implantation; semiconductor process modelling; 2 mum; 2D device simulations; Arora doping transformation model; CMOS low voltage process; EKV model; MASTAR model; analog circuit simulation; ion implantation; nonuniform substrate doping modelling; punch through effect avoidance; step model; threshold voltage adjustment; Analog circuits; CMOS process; CMOS technology; Circuit simulation; Doping; Ion implantation; Laboratories; Semiconductor device modeling; Semiconductor process modeling; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems, 1996. ISCAS '96., Connecting the World., 1996 IEEE International Symposium on
  • Conference_Location
    Atlanta, GA
  • Print_ISBN
    0-7803-3073-0
  • Type

    conf

  • DOI
    10.1109/ISCAS.1996.541995
  • Filename
    541995