Title :
Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications
Author :
Dayal, P. Babu ; Nakajima, J. ; Sakaguchi, T. ; Matsutani, A. ; Koyama, F.
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama
Abstract :
We propose a method of making multi-wavelength VCSEL arrays using surface nano-machining process. Preliminary results of 4-channel 980 nm VCSEL array with 5.4 nm wavelength spacing by multi-step wet etching of spacer layer are presented.
Keywords :
laser beam etching; laser beam machining; surface emitting lasers; wavelength division multiplexing; VCSEL; WDM; multi-step wet etching; surface nano-machining process; wavelength 5.4 nm; wavelength 980 nm; Dielectrics; Gratings; Laser tuning; Mirrors; Optical surface waves; Shape control; Vertical cavity surface emitting lasers; Wafer bonding; Wavelength division multiplexing; Wet etching;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688659
