Design and performance of constant-temperature circuits for microbridge-sensor applications

Author

Mastrangelo, C.H. ; Muller, R.S.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1991

Firstpage

471

Lastpage

474

Abstract

The performance and transient behavior of constant-temperature microbridge bias circuits are analyzed and measured. This type of circuit enhances the microbridge gas-induced signals with respect to those induced by the substrate temperature. If is found that this type of circuit must be compensated to prevent excessive microbridge overheating. The elimination of temperature overshoot implies a reduction in the circuit bandwidth.<>

Keywords

compensation; differential amplifiers; electric sensing devices; micromechanical devices; bandwidth reduction; constant-temperature circuits; design; differential amplifier; microbridge bias circuits; microbridge gas-induced signals; microbridge overheating; microbridge-sensor; performance; substrate temperature; temperature overshoot; transient behavior; Application software; Circuit analysis; Circuit testing; Laboratories; Performance analysis; Resistors; Temperature sensors; Thermal conductivity; Thermal resistance; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148914

Filename

148914