Title :
RF sputtered FeCoN soft magnetic thin films with high resistivity
Author :
Hai Jiang ; Yingjian Chen ; Yiming Huai
Author_Institution :
ReadRite Corp., Fremont, CA, USA
Abstract :
Summary form only given. FeCo alloy has the highest magnetic moment among the existing magnetic materials. How to make FeCo based soft magnetic thin films has attracted a lot of attention recently. In this experiment, a series of /spl sim/45 nm Fe/sub 70/Co/sub 30/N thin films were prepared on a glass wafer at room temperature by reactive RF sputtering with nitrogen. A 40 Oe field was applied during deposition to induce a desired uniaxial anisotropy in the films. The optimization conditions include nitrogen flow rate percentage and sputtering pressure. The magnetic properties of the thin films were measured by the B-H loop tracer and the structure of the thin films was investigated by XRD. The resistivity was measured by the four-point probe method.
Keywords :
X-ray diffraction; alloying additions; cobalt alloys; electrical resistivity; ferromagnetic materials; induced anisotropy (magnetic); iron alloys; magnetic heads; magnetic thin films; nitrogen; soft magnetic materials; sputter deposition; sputtered coatings; 45 nm; B-H loop tracer; Fe/sub 70/Co/sub 30/N; Fe/sub 70/Co/sub 30/N thin films; FeCo alloy; FeCoN soft magnetic thin films; N; N flow rate percentage; RF sputtered FeCoN thin films; XRD; four-point probe; glass wafer; high resistivity; magnetic properties; nitrogen; optimization conditions; reactive RF sputtering; sputtering pressure; thin film structure; uniaxial anisotropy; Conductivity; Glass; Iron; Magnetic films; Magnetic materials; Magnetic moments; Nitrogen; Radio frequency; Sputtering; Temperature;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001259
