Title :
On the resonance frequencies of microbridges
Author :
Bouwstra, S. ; Geijselaers, B.
Author_Institution :
Twente Univ., Enschede, Netherlands
Abstract :
The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor.<>
Keywords :
bridge circuits; circuit resonance; electric sensing devices; flow measurement; flowmeters; micromechanical devices; axial force; buckled beam; deflected beams; elastic support; flat clamped-clamped beams; natural frequencies; resonance frequencies; resonating microbridge mass flow sensor; transverse bending; transversely vibrating microbridges; Crystal microstructure; Equations; Geometry; Micromechanical devices; Resonance; Resonant frequency; Semiconductor thin films; Silicon; Solid state circuits; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148932
