DocumentCode
1575671
Title
Spatial resolution and feature size determination in extreme ultraviolet microscope images
Author
Marconi, M.C. ; Wachulak, P.W. ; Brizuela, F. ; Brewer, C.A. ; Bartels, R. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
fYear
2008
Firstpage
828
Lastpage
829
Abstract
We have developed a numerical algorithm that, applied to extreme ultraviolet (EUV) micrographs, allows for the simultaneous determination of the spatial resolution and the size of the features of the image. The validity of the method was evaluated by analyzing EUV images.
Keywords
feature extraction; image resolution; optical correlation; optical microscopy; correlation method; extreme ultraviolet micrographs; extreme ultraviolet microscope images; feature size; spatial resolution; Degradation; Gratings; Image analysis; Image resolution; Lighting; Optical filters; Scanning electron microscopy; Spatial resolution; Testing; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location
Acapulco
Print_ISBN
978-1-4244-1931-9
Electronic_ISBN
978-1-4244-1932-6
Type
conf
DOI
10.1109/LEOS.2008.4688877
Filename
4688877
Link To Document