Title :
A dual-mass capacitive-readout accelerometer operated near pull-in
Author :
Woestyn, P. ; Raman, J. ; Rombouts, P. ; Weyten, L. ; De Baets, P.
Author_Institution :
Electron. & Inf. Syst., Ghent Univ., Ghent, Belgium
Abstract :
A mechanical two-mass configuration and a readout circuit for a single-axis capacitive-readout accelerometer with ΣΔ force-feedback is presented. The system reduces electrical and quantisation input-referred noise through the use of negative springs, reduced gaps in the readout capacitors and maximised readout voltage. A theoretical analysis and simulation results are discussed.
Keywords :
accelerometers; capacitors; force feedback; micromechanical devices; readout electronics; sigma-delta modulation; springs (mechanical); ΣΔ force feedback; dual-mass capacitive-readout accelerometer; electrical noise; mechanical two-mass configuration; negative spring; pull-in operation; quantisation input-referred noise; readout capacitor; readout voltage; single-axis capacitive-readout accelerometer; Accelerometers; Capacitance; Capacitors; Circuit noise; Information systems; Noise reduction; Production systems; Springs; Stators; Voltage;
Conference_Titel :
Circuits and Systems (MWSCAS), 2010 53rd IEEE International Midwest Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-7771-5
DOI :
10.1109/MWSCAS.2010.5548875
