Title :
Electronic temperature compensation of clamped-clamped beam MEMS resonators
Author :
Zadeh, Gorji S A ; Saha, T. ; Allidina, K. ; Nabki, F. ; El-Gamal, M.N.
Author_Institution :
McGill Univ., Montreal, QC, Canada
Abstract :
An electronic system for temperature compensation of MEMS resonators is proposed. The system is based on a dual resonator compensation technique using thermal feedback. It allows for the implementation of a fully integrated solution, while minimizing the complexity of the compensation circuitry. Design methodologies are introduced along with analysis equations. The circuitry is implemented in 0.18 μm CMOS technology. The system exhibits a simulated temperature stability of ±0.74 ppm over a -45 °C to 85 °C temperature range, and has a power consumption of 181 mW.
Keywords :
CMOS integrated circuits; compensation; micromechanical resonators; CMOS technology; clamped-clamped beam MEMS resonators; dual-resonator compensation technique; electronic temperature compensation; power 181 mW; size 0.18 mum; temperature -45 degC to 85 degC; thermal feedback; CMOS technology; Circuit simulation; Circuit stability; Design methodology; Energy consumption; Equations; Feedback; Integrated circuit technology; Micromechanical devices; Temperature distribution;
Conference_Titel :
Circuits and Systems (MWSCAS), 2010 53rd IEEE International Midwest Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-7771-5
DOI :
10.1109/MWSCAS.2010.5548878
