A thin film technology eddy current microsensor

Summary form only given. Eddy current measurement for non-destructive testing excels due to its simplicity and reliability. While originally developed as an inspection technique for detecting large scale defects, there is a growing need to also identify micron scale cracks. This application necessitates smaller sensors with improved resolution and sensitivity. In this paper, the authors present an eddy current microsensor for the detection of surface microcracks in both ferrous and non-ferrous metals.