DocumentCode
1577898
Title
Application Of Microelectronic Fabrication Techniques For The Development Of Biosensors
Author
Liu, Chung-Chiun
Author_Institution
Case Western Reserve University
fYear
1990
Firstpage
1758
Lastpage
1759
Keywords
Acoustic sensors; Biosensors; Chemical and biological sensors; Electrodes; Fabrication; Metallization; Microelectronics; Optical surface waves; Sensor phenomena and characterization; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Engineering in Medicine and Biology Society, 1990., Proceedings of the Twelfth Annual International Conference of the IEEE
Print_ISBN
0-87942-559-8
Type
conf
DOI
10.1109/IEMBS.1990.692003
Filename
692003
Link To Document