Microelectromechanical Relay and Logic Circuit Design for Zero Crowbar Current

A compact microelectromechanical (MEM) switch design and associated family of logic gates, memory cells, and other basic very-large-scale integration (VLSI) digital circuit sub blocks are proposed to ensure zero crowbar current in addition to zero leakage current while minimizing mechanical delay. The circuit design methodology introduced in this paper also provides for lower device count and hence lower operating power consumption. A prototype of the MEM switch design is demonstrated.