Title :
FEM model of electrostatically actuated MEMS temperature sensor
Author :
Atia, Ammar ; Ibrahim, Mohammad ; Abdul-Jabbar, Omer ; Hassan, Mehdi
Author_Institution :
Fac. of Eng., Sudan Univ. of Sci. & Technol., Khartoum, Sudan
Abstract :
Micro electromechanical system (MEMS) is an emerging technology that gives high accuracy and high speed with least error due to the micro dimension. To design a simple but accurate MEMS sensors remains a challenge. Modeling of a MEMS temperature sensor, using simple microcantilever structure, is represented in this paper. The sensor is actuated electrostatically. The effect of temperature on the resonance was calculated ANSYS software. The device was made of copper (contact electrode), silicon (vibrating part) and silicon oxide (insulation layer). When the temperature varies the properties of the MEMS device also changes and hence the resonance frequency.
Keywords :
cantilevers; copper; electrostatic actuators; elemental semiconductors; finite element analysis; microsensors; silicon; silicon compounds; temperature sensors; ANSYS software; Cu-Si-SiO; FEM model; copper contact electrode; electrostatically actuated MEMS temperature sensor; insulation silicon oxide layer; microcantilever structure; microelectromechanical system; resonance frequency; silicon layer; temperature effect; Finite element analysis; Micromechanical devices; Resonant frequency; Silicon; Temperature; Temperature measurement; Temperature sensors; FEM Model; actuated MEMS; electrostatical; temperature sensor;
Conference_Titel :
Computing, Electrical and Electronics Engineering (ICCEEE), 2013 International Conference on
Conference_Location :
Khartoum
Print_ISBN :
978-1-4673-6231-3
DOI :
10.1109/ICCEEE.2013.6633959
