Title :
13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
Abstract :
The following topics are dealt with: advanced FEOL processing; fab dynamics; yield enhancement tools and methods; process control methodology; resource productivity management; yield modeling, analysis and enhancement; defect-free manufacturing; contamination-free manufacturing; cost management methodologies; advanced BEOL processing; advanced metrology.
Keywords :
semiconductor device manufacture; BEOL processing; FEOL processing; contamination-free manufacturing; cost management; defect-free manufacturing; fab dynamics; metrology; process control; resource productivity management; semiconductor manufacturing; yield enhancement; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7158-5
DOI :
10.1109/ASMC.2002.1001562
