Title :
Analysis of microstructures incorporating ferroelectric thin films
Author :
Bland, T.A. ; Patel, A. ; Obhi, J.S. ; Shorrocks, N.M. ; Beanland, R. ; Wright, R.V. ; Kirby, P.B.
Author_Institution :
GEC-Marconi Mater. Technol. Ltd., Towcester, UK
fDate :
11/30/1995 12:00:00 AM
Abstract :
We have been working on sensors that involve the integration of ferroelectric thin films with micromachined structures. Both surface and bulk micromachining techniques are under development for integrated infrared detector arrays and accelerometers, respectively. These devices take advantage of the pyroelectric or piezoelectric properties of the thin films. A sol-gel route has been used to deposit the ferroelectric thin film, enabling direct integration with the micromachined structures. PbZrxTi1-xO3 (PZT) films with compositions of x=0.3 and x=0.5 have been used for the infrared detector arrays and accelerometers respectively. Several different techniques have been used to assess these films including X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy
Keywords :
Raman spectra; X-ray diffraction; accelerometers; arrays; etching; ferroelectric devices; ferroelectric thin films; infrared detectors; lead compounds; micromachining; microsensors; piezoceramics; piezoelectric thin films; piezoelectric transducers; pyroelectric detectors; scanning electron microscopy; sol-gel processing; transmission electron microscopy; PZT; PbZrO3TiO3; Raman spectroscopy; Si; X-ray diffraction; bulk micromachining; direct integration; ferroelectric thin films integration; figure of merit; integrated accelerometers; integrated infrared detector arrays; micromachined structures; piezoelectric film; pyroelectric array; scanning electron microscopy; sol-gel route; surface micromachining; transmission electron microscopy;
Conference_Titel :
Methods of Materials Measurement in Microengineering, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19951469
