Title :
Micromachining and artificial neural networks: the future of smart sensing
Author :
Madni, Asad M. ; Yun, Weijie ; Wan, Lawrence A.
Author_Institution :
BEI Sensors & Syst. Co. Inc., Sylmar, CA, USA
Abstract :
A new concept in “smart sensing” is presented utilizing silicon micromachining and artificial neural network (ANN) techniques. The basics of silicon micromachining and multilayer artificial neural networks with supervised training are discussed. An “intelligent” single sensor system and a multiple sensor system are discussed using a pressure sensing requirement as an example. These techniques can be adapted to numerous requirements pertaining to the aerospace, defense, commercial and industrial needs in a cost effective manner
Keywords :
CMOS integrated circuits; digital signal processing chips; feedforward neural nets; intelligent sensors; micromachining; microsensors; monolithic integrated circuits; neural chips; sensor fusion; DSP chips; generic monolithic chips; intelligent sensor; multilayer artificial neural networks; pressure sensing; sensor fusion; silicon micromachining; smart sensing; supervised training; Artificial intelligence; Artificial neural networks; Control systems; Intelligent sensors; Micromachining; Process control; Sensor systems; Sensor systems and applications; Silicon; Space technology;
Conference_Titel :
Aerospace Applications Conference, 1995. Proceedings., 1995 IEEE
Conference_Location :
Aspen, CO
Print_ISBN :
0-7803-2473-0
DOI :
10.1109/AERO.1995.468923
