DocumentCode
1580236
Title
Trace gas analysis by diode laser cavity ring-down spectroscopy
Author
Yan, Wen-Bin ; Krusen, Calvin ; Dudek, John ; Lehmann, Kevin ; Rabinowitz, P.
Author_Institution
Tiger Opt., Warrington, PA, USA
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
319
Lastpage
323
Abstract
The first commercial analyzer based on cavity ringdown spectroscopy (CRDS) was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture from 200 parts-per-trillion (PPT) to 5 ppm. Trace moisture test data will be presented to demonstrate the speed of response, sensitivity, and accuracy of the analyzer.
Keywords
integrated circuit manufacture; measurement by laser beam; moisture measurement; process monitoring; semiconductor technology; spectrochemical analysis; MTO-1000 analytical system; accuracy; continuous monitoring; diode laser cavity ring-down spectroscopy; laser spectroscopy; process analyzers; response speed; semiconductor manufacture; sensitivity; trace gas analysis; trace moisture test data; ultra trace gas impurities; Diode lasers; Electromagnetic wave absorption; Gases; Moisture; Monitoring; Optical sensors; Pollution measurement; Ring lasers; Semiconductor lasers; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop
Print_ISBN
0-7803-7158-5
Type
conf
DOI
10.1109/ASMC.2002.1001626
Filename
1001626
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