Title :
Fabrication of microsensor and microactuator elements by the LIGA-process
Author :
Mohr, J. ; Bley, P. ; Burbaum, C. ; Menz, W. ; Wallrabe, U.
Author_Institution :
Inst. fur Mikrostruktrurtech., Karlsruhe, Germany
Abstract :
By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated. Their characteristics and results concerning their behavior are presented.<>
Keywords :
X-ray lithography; accelerometers; electric actuators; electric drives; electric sensing devices; etching; micromechanical devices; semiconductor technology; small electric machines; turbines; LIGA; capacitive acceleration sensor; electrostatic drive; linear comb-drive; microactuator; microsensor; microturbine; movable microstructures; sacrificial layer; semiconductor technology; Acceleration; Axles; Capacitance; Electrostatics; Fabrication; Frequency; Friction; Microactuators; Microsensors; Optical fibers;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148951
