• DocumentCode
    1580747
  • Title

    ASMC 2002 Authors

  • fYear
    2002
  • Firstpage
    422
  • Lastpage
    430
  • Abstract
    Presents an index of the authors whose papers are published in the conference.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7158-5
  • Type

    conf

  • DOI
    10.1109/ASMC.2002.1001644
  • Filename
    1001644