Title :
Electromagnetic microactuators with multiple degrees of freedom
Author :
Wagner, B. ; Kreutzer, M. ; Benecke, W.
Author_Institution :
Fraunhofer Inst. fur Mikrostrukturtech., Berlin, Germany
Abstract :
Various types of actuators have been fabricated which make use of electromagnetic forces within micromachined silicon devices. A Nd-Fe-B permanent magnet is bonded to a movable silicon plate suspended by thin silicon beams. Planar coils are integrated monolithically on the chip to generate the driving magnetic field. Different actuators for torsional motion, with two degrees of freedom and with three degrees of freedom, are investigated theoretically and experimentally. Torsional angles up to 8 degrees and vertical displacements up to 40 mu m have been achieved.<>
Keywords :
electric actuators; electromagnetic devices; integrated circuit technology; micromechanical devices; permanent magnets; semiconductor technology; small electric machines; 40 micron; Em microactuators; Nd-Fe-B permanent magnet; Si beam; Si plate; actuators; driving magnetic field; electromagnetic forces; micromachined Si devices; multiple degrees of freedom; planar coil; torsional motion; vertical displacements; Actuators; Coils; Electromagnetic forces; Magnetic levitation; Magnetic separation; Magnetization; Microactuators; Permanent magnets; Silicon; Torque;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148953
