Title :
Life cycle inventory development for wafer fabrication in semiconductor manufacturing
Author :
Murphy, Cynthia F. ; Laurent, Jean-Philippe ; Allen, David T.
Author_Institution :
Texas Univ., Austin, TX, USA
Abstract :
Process-based, generic, parametric modules are used to manage wafer fabrication life-cycle inventory data in order to stream-line life cycle analysis activities, accommodate rapidly changing technologies, and accurately reflect the highly significant role that wafer fabrication processes have in the life cycle of an integrated circuit.
Keywords :
environmental factors; integrated circuit manufacture; semiconductor technology; CVD; chemical vapor deposition; energy consumption; generic modules; integrated circuit life cycle; life cycle analysis activities stream-lining; life cycle inventory development; mass-energy balance; material consumption; parametric modules; process-based modules; semiconductor manufacturing; thermal oxidation; wafer clean; wafer fabrication; wafer fabrication life-cycle inventory data; Chemical vapor deposition; Conducting materials; Fabrication; Integrated circuit manufacture; Inventory management; Manufacturing processes; Product design; Semiconductor device manufacture; Semiconductor materials; Technology management;
Conference_Titel :
Electronics and the Environment, 2003. IEEE International Symposium on
Print_ISBN :
0-7803-7743-5
DOI :
10.1109/ISEE.2003.1208089
