Title :
Redundant MEMS resonators for precise reference oscillators
Author :
Quévy, Emmanuel P. ; Howe, Roger T.
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
The paper describes a new approach for the monolithic integration of precise, temperature-stable reference oscillators for wireless communications. SiGe integrated MEMS technology enables fabrication of an array of resonators, which is key to digital strategies for temperature compensation and trimming of the oscillator´s absolute frequency.
Keywords :
Ge-Si alloys; compensation; micromechanical resonators; monolithic integrated circuits; radiofrequency integrated circuits; radiofrequency oscillators; temperature sensors; MEMS resonator design; SiGe; absolute frequency; integrated temperature sensor; monolithic integration; precise reference oscillators; redundant MEMS resonators; temperature compensation; temperature-stable reference oscillators; Frequency; Germanium silicon alloys; Micromechanical devices; Monolithic integrated circuits; Oscillators; Silicon germanium; Switches; Temperature distribution; Temperature sensors; Wireless communication;
Conference_Titel :
Radio Frequency integrated Circuits (RFIC) Symposium, 2005. Digest of Papers. 2005 IEEE
Print_ISBN :
0-7803-8983-2
DOI :
10.1109/RFIC.2005.1489602
