A New Nano-Probe Using Micro Assembly Transfer

This paper demonstrates a new force sensing nano-probe that allows a cost effective nano-tip to be easily assembly on a tuning fork sensor. By taking advantages of surface micromachined tip fabrication, the subsequent assembly-transfer procedures are able to minimize the mass load effect of a tuning fork based atomic force microscopy (AFM). Furthermore, the micro assembly transfer of nano-probes can also be achieved to manufacture devices in an easy way and to mount the probe precisely. This approach is compatible with CMOS process and able to integrate micromachined probes into an alternative host chip