• DocumentCode
    1584262
  • Title

    A new modal mode controlling method for a surface format surrounding mass accelerometer

  • Author

    Yamada, K. ; Kuriyama, T.

  • Author_Institution
    NEC Corp., Kanagawa, Japan
  • fYear
    1991
  • Firstpage
    655
  • Lastpage
    658
  • Abstract
    A new model mode controlling method for a surface format surrounding mass accelerometer is presented. The controlling method can attain a stable feedback control without imposing a degree-of-freedom limitation on the sensor structure by using a multi-force balancing system. The controlling is based on the finite element method simulation result for the accelerometer structure and the fact that almost all vibrations occurring in the accelerometer in a normal vibrational environment can be expressed by a very small number of vibrational mode series. For this work, an application for the surface format surrounding mass accelerometer is presented as a demonstration.<>
  • Keywords
    accelerometers; feedback; finite element analysis; micromechanical devices; vibration control; vibrations; Si-SiO/sub 2/; degree-of-freedom limitation; fabrication; feedback control; finite element method; machine control; mass accelerometer; modal mode control; multi-force balancing; sensor structure; simulation; surface format; vibrations; Accelerometers; Control systems; Feedback control; Force control; Frequency; Laboratories; Motion control; Sensor systems; Vibration control; Weight control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
  • Conference_Location
    San Francisco, CA, USA
  • Print_ISBN
    0-87942-585-7
  • Type

    conf

  • DOI
    10.1109/SENSOR.1991.148965
  • Filename
    148965