DocumentCode
1585048
Title
An overview of where the fields of SoCs, HDI and MEMS are heading to and how to characterize them
Author
Domman, A.
Author_Institution
CSEM
fYear
2006
Keywords
Micromechanical devices; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Very Large Scale Integration, 2006 IFIP International Conference on
Conference_Location
Nice, France
Print_ISBN
3-901882-19-7
Type
conf
DOI
10.1109/VLSISOC.2006.313280
Filename
4107591
Link To Document