• DocumentCode
    1585048
  • Title

    An overview of where the fields of SoCs, HDI and MEMS are heading to and how to characterize them

  • Author

    Domman, A.

  • Author_Institution
    CSEM
  • fYear
    2006
  • Keywords
    Micromechanical devices; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Very Large Scale Integration, 2006 IFIP International Conference on
  • Conference_Location
    Nice, France
  • Print_ISBN
    3-901882-19-7
  • Type

    conf

  • DOI
    10.1109/VLSISOC.2006.313280
  • Filename
    4107591