Title :
The heating component of RTP system
Author :
Junjie, Yuan ; Guangping, He ; Jiying, Yin
Author_Institution :
College of Mechanical Electronical and Engineering, North China University of Techonogy, No.5 Jinyuanzhuang Road, Shijingshan District, Beijing, China
Abstract :
The rapid thermal processing (RTP) system requires critical control of temperature uniformity. For most RTP system, the structure and heating modes of heating component determined the control strategy. Major types of the heating system of nowadays RTP systems were reviewed and compared. Then a heating system for RTP was proposed to improve the uniformity of heaving emission, which includes optimally designed light path and high efficient light reflecting system. The simulating results of that were also given.
Keywords :
Control systems; Educational institutions; Heat engines; Heating; Helium; Rapid thermal processing; Temperature control; Thermal engineering;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2008. RTP 2008. 16th IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
978-1-4244-1950-0
Electronic_ISBN :
978-1-4244-1951-7
DOI :
10.1109/RTP.2008.4690565
