Title :
Compact, thermally-tuned resonant ring muxes in CMOS with integrated backside pyramidal etch pit
Author :
Cunningham, John E. ; Shubin, Ivan ; Zheng, Xuezhe ; Li, Guoliang ; Thacker, Hiren ; Luo, Ying ; Yao, Jin ; Raj, Kannan ; Guenin, Bruce ; Pinguet, Thierry ; Krishnamoorthy, Ashok V.
Author_Institution :
Oracle, San Diego, CA, USA
Abstract :
We present add-drop filters manufactured as ring resonators in commercial 130 nm SOI CMOS technology with thermal tuning. Their thermal impedance has been dramatically increased by the selective removal of the substrate resulting in a 20,12× increase in tuning efficiency for 100, 30 micron radius device.
Keywords :
CMOS integrated circuits; etching; integrated optics; optical filters; optical resonators; silicon-on-insulator; SOI CMOS technology; add-drop filters; compact thermally-tuned resonant ring muxes; integrated backside pyramidal etch pit; ring resonators; size 130 nm; thermal impedance; CMOS integrated circuits; Optical filters; Optical waveguides; Performance evaluation; Photonics; Silicon; Tuning;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2011 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4577-0213-6
